双脉冲HiPIMS放电特性及CrN薄膜高速率沉积
吴厚朴,田修波(
),张新宇,巩春志
),张新宇,巩春志
Discharge Characteristics of Novel Dual-Pulse HiPIMS and Deposition of CrN Films with High Deposition Rate
Houpu WU,Xiubo TIAN(),Xinyu ZHANG,Chunzhi GONG
),Xinyu ZHANG,Chunzhi GONG
图9. 双脉冲HiPIMS不同引燃脉冲电压下CrN薄膜的XRD谱
Fig.9. XRD spectra of CrN coatings deposited by dual-pulse HiPIMS with different ignition pulse voltages
