双脉冲HiPIMS放电特性及CrN薄膜高速率沉积
吴厚朴,田修波(
),张新宇,巩春志
),张新宇,巩春志
Discharge Characteristics of Novel Dual-Pulse HiPIMS and Deposition of CrN Films with High Deposition Rate
Houpu WU,Xiubo TIAN(),Xinyu ZHANG,Chunzhi GONG
),Xinyu ZHANG,Chunzhi GONG
图2. 双脉冲HiPIMS不同引燃脉冲电压及传统HiPIMS条件下靶电压和靶电流波形图
Fig.2. Waveforms of target voltage (a) and target current (b) of conventional HiPIMS and dual-pulse HiPIMS with different ignition voltages (Inset in Fig.2a shows the enlarged view)
