双脉冲HiPIMS放电特性及CrN薄膜高速率沉积
吴厚朴,田修波(
),张新宇,巩春志
),张新宇,巩春志
Discharge Characteristics of Novel Dual-Pulse HiPIMS and Deposition of CrN Films with High Deposition Rate
Houpu WU,Xiubo TIAN(),Xinyu ZHANG,Chunzhi GONG
),Xinyu ZHANG,Chunzhi GONG
图6. 传统HiPIMS及双脉冲HiPIMS放电机理示意图
Fig.6. Schematics of the discharge mechanism of conventional HiPIMS (a) and dual-pulse HiPIMS (b)
