溅射沉积Mg2(Sn, Si)薄膜组织结构与导电性能
宋贵宏,李贵鹏,刘倩男,杜昊,胡方

Microstructure and Electric Conductance of Mg2(Sn, Si) Thin Films by Sputtering
Guihong SONG,Guipeng LI,Qiannan LIU,Hao DU,Fang HU
表2 沉积薄膜的Hall系数、载流子浓度、电导率和迁移率
Table 2 The Hall coefficient, concentration, conductivity and mobility of carriers in deposited films

Sample

No.

Hall coefficient

cm3·C-1

Bulk concentration

cm-3

Conductivity

S·cm-1

Mobility

cm2·V-1·s-1

S14.68×10-41.38×10224.43×10420.7
S29.48×10-47.18×10216.92×10465.4
S37.72×10-48.13×10216.20×10447.9
S42.10×10-37.83×10214.09×10432.6
S53.12×10-32.00×10213.62×10311.3
S64.09×10-21.53×10211.63×1026.7