溅射沉积Mg2(Sn, Si)薄膜组织结构与导电性能
宋贵宏1(
),李贵鹏1,刘倩男1,杜昊2(),胡方1
),李贵鹏1,刘倩男1,杜昊2(),胡方1
Microstructure and Electric Conductance of Mg2(Sn, Si) Thin Films by Sputtering
SONG Guihong1(),LI Guipeng1,LIU Qiannan1,DU Hao2(),HU Fang1
),LI Guipeng1,LIU Qiannan1,DU Hao2(),HU Fang1
图3. 沉积S1样品的XPS
Fig.3. XPS of the deposited S1 sample(a) Mg1s (b) Sn3d (c) Si2p (d) Bi4f
