Nd含量对磁控溅射Si(111)/Cr/Nd-Co/Cr薄膜结构与磁性的影响
何贤美1,童六牛2(),高成2,王毅超2
Effect of Nd Content on the Structure and Magnetic Properties of Si(111)/Cr/Nd-Co/Cr Thin Films Prepared by Magnetron Sputtering
HE Xianmei1,TONG Liuniu2(),GAO Cheng2,WANG Yichao2

图5. 制备态薄膜的单轴磁各向异性常数(Ku)和MFM像相移的均方根偏差(Δ?rms)随x的变化曲线

Fig.5. The x dependence of the magnetic uniaxial anisotropy constant (Ku) and the root mean square deviation of phase shift in MFM images (Δ?rms) of the as-deposited films