Mo含量对CrMoN复合涂层的组织结构和性能的影响

齐东丽, 雷浩, 范迪, 裴志亮, 宫骏, 孙超

EFFECT OF Mo CONTENT ON THE MICROSTRUC-TURE AND PROPERTIES OF CrMoN COMPOSITE COATINGS

QI Dongli, LEI Hao, FAN Di, PEI Zhiliang, GONG Jun, SUN Chao

表2 不同Mo含量CrMoN复合涂层的金属元素原子分数、厚度、沉积速率、晶粒尺寸和显微硬度

Table 2 Atomic fraction of the metal elements, thickness, deposition rate, grain size and hardness of CrMoN composite coatings with different Mo content

Sample No. Atomic fraction / % Thickness μm Deposition rate (nm·s-1) Grain size nm Hardness HV Cr Mo 1 100.0 0.0 1.58 0.44 19.0 1802 2 79.6 20.4 1.66 0.23 16.3 1910 3 68.7 31.3 1.70 0.24 15.2 1993 4 61.6 45.4 1.80 0.25 12.5 2714 5 45.8 54.2 1.57 0.22 14.5 2235 6 30.7 69.3 1.52 0.20 18.0 2206