基于磁控溅射法显微CT W-Al透射靶材的制备及其性能研究*
马玉田,刘俊标(
),霍荣岭,韩立,牛耕
),霍荣岭,韩立,牛耕
RESEARCH ON THE PREPARATION AND PERFOR-MANCE OF TUNGSTEN-ALUMINUM TRANSMIS-SION TARGET FOR MICRO-COMPUTED TOMOGRAPHY BY MAGNETRONSPUTTERING
Yutian MA,Junbiao LIU(),Rongling HUO,Li HAN,Geng NIU
),Rongling HUO,Li HAN,Geng NIU
图6. 不同条件下使用W靶面厚度为5 μm的靶材和YXLON靶材的X射线成像
Fig.6. X-ray images used W-Al transmission target with thickness of 5 μm (a, c) and W-Al transmission target of YXLON (b, d) under acceleration voltage of 50 kV and emission current of 53 μA (a, b) and acceleration voltage of 60 kV and emission current of 153 μA (c, d)
