基于磁控溅射法显微CT W-Al透射靶材的制备及其性能研究*
马玉田,刘俊标(),霍荣岭,韩立,牛耕
RESEARCH ON THE PREPARATION AND PERFOR-MANCE OF TUNGSTEN-ALUMINUM TRANSMIS-SION TARGET FOR MICRO-COMPUTED TOMOGRAPHY BY MAGNETRONSPUTTERING
Yutian MA,Junbiao LIU(),Rongling HUO,Li HAN,Geng NIU

图1. W-Al端窗透射靶材的理论模型

Fig.1. Theoretical model of the tungsten-aluminum end-window transmission target (h1—thickness of tungsten target surface, h2—thickness of aluminum substrate, x—average depth from thin layer to target surface, S—area of detector window, θ—angle between characteristic X-ray and target surface)