纳米压痕法确定TSV-Cu的应力-应变关系*

秦飞, 项敏, 武伟

THE STRESS-STRAIN RELATIONSHIP OF TSV-Cu DETERMINED BY NANOINDENTATION

QIN Fei, XIANG Min, WU Wei

表2 反演分析结果

Table 2 Results of reverse analysis

Sample Indentation test Current reverse algorithm Wp/Wt ht/hm Error hr/hm % σr MPa Error (σr) % n Error (n) % εr Error (εr) % σy MPa Error (σy) % 1 0.91284 0.93496 -0.142 491 0.204 0.4951 1.206 0.0364 -0.274 45.28 -5.49 2 0.92460 0.94345 0.765 452 -7.755 0.4182 -14.513 0.0373 2.192 70.60 47.36 3 0.91580 0.93709 0.085 487 -0.612 0.4625 -5.458 0.0370 1.370 58.00 21.06 4 0.91779 0.93853 0.239 483 -1.429 0.4817 -1.533 0.0370 1.370 47.04 -1.82 5 0.90925 0.93236 -0.420 522 6.531 0.5372 9.812 0.0353 -3.288 32.99 -31.14 6 0.91182 0.934221 -0.221 516 5.306 0.4552 -6.950 0.0374 2.466 67.46 40.81 7 0.91611 0.93732 0.110 474 -3.265 0.5249 7.298 0.0357 -2.192 31.25 -34.77 8 0.90932 0.93241 -0.414 497 1.429 0.5388 10.139 0.0356 -2.466 30.68 -35.96 Aver. 0.91469 0.93629 0.0003 490 0.0511 0.4892 0.0001 0.0365 -0.1028 47.91 0.0063