纳米压痕法确定TSV-Cu的应力-应变关系
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秦飞, 项敏, 武伟
THE STRESS-STRAIN RELATIONSHIP OF TSV-Cu DETERMINED BY NANOINDENTATION
QIN Fei, XIANG Min, WU Wei
表1
TSV-Cu的弹性模量E与硬度H
Table 1
Elastic modulus E and hardness H of TSV-Cu
Sample
E/GPa
H/GPa
1
152.08
2.69
2
158.56
2.28
3
154.42
2.45
4
158.73
2.35
5
159.01
2.58
6
155.71
2.65
7
154.72
2.41
8
150.55
2.31
Average
155.47
2.47