N2流量对HIPIMS制备TiSiN涂层结构和力学性能的影响*
王振玉, 徐胜, 张栋, 刘新才, 柯培玲, 汪爱英

INFLUENCE OF N2 FLOW RATE ON STRUCTURES AND MECHANICAL PROPERTIES OF TiSiN COATINGS PREPARED BY HIPIMS METHOD
WANG Zhenyu, XU Sheng, ZHANG Dong, LIU Xincai, KE Peiling, WANG Aiying
表1 不同N2流量下TiSiN涂层的化学成分
Flow rate / (mL·min-1) Ti N Si
10 39.11 54.75 6.14
20 38.34 55.17 6.49
30 37.46 55.43 7.11
40 37.22 54.89 7.89
50 37.01 54.85 8.14