图7. 双脉冲HiPIMS引燃脉冲电压及HiPIMS条件对Ar+和Cr0的单位功率特征光谱强度的影响
Fig.7. Influence of ignition pulse voltage of dual-pulse HiPIMS and conventional HiPIMS on the optical spectrum intensity of Ar+ (a) and Cr0 (b) at unit power