MoC掺杂钌基合金无籽晶阻挡层微结构及热稳定性研究
邹建雄1,刘波1(),林黎蔚1,任丁1,焦国华2,鲁远甫2,徐可为3
Microstructure and Thermal Stability of MoC DopedRu-Based Alloy Films as Seedless Diffusion Barrier
Jianxiong ZOU1,Bo LIU1(),Liwei LIN1,Ding REN1,Guohua JIAO2,Yuanfu LU2,Kewei XU3

图5. 沉积态和500 ℃退火态RuMoC II样品的C1s、Ru3d和O1s XPS谱

Fig.5. XPS spectra of C1s (a), Ru3d (b) and O1s (c) from as-deposited and 500 ℃ annealed RuMoC II samples