MoC掺杂钌基合金无籽晶阻挡层微结构及热稳定性研究
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邹建雄 1,刘波 1( ),林黎蔚 1,任丁 1,焦国华 2,鲁远甫 2,徐可为 3
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Microstructure and Thermal Stability of MoC DopedRu-Based Alloy Films as Seedless Diffusion Barrier
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Jianxiong ZOU 1,Bo LIU 1( ),Liwei LIN 1,Ding REN 1,Guohua JIAO 2,Yuanfu LU 2,Kewei XU 3
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图5. 沉积态和500 ℃退火态RuMoC II样品的C1s、Ru3d和O1s XPS谱
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Fig.5. XPS spectra of C1s (a), Ru3d (b) and O1s (c) from as-deposited and 500 ℃ annealed RuMoC II samples |
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