MoC掺杂钌基合金无籽晶阻挡层微结构及热稳定性研究
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邹建雄 1,刘波 1( ),林黎蔚 1,任丁 1,焦国华 2,鲁远甫 2,徐可为 3
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Microstructure and Thermal Stability of MoC DopedRu-Based Alloy Films as Seedless Diffusion Barrier
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Jianxiong ZOU 1,Bo LIU 1( ),Liwei LIN 1,Ding REN 1,Guohua JIAO 2,Yuanfu LU 2,Kewei XU 3
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图4. 试样A和B沉积态和不同温度退火态的GIXRD谱
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Fig.4. GIXRD patterns of sample A (a) and B (b) as-deposited and annealed at different temperatures |
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