MoC掺杂钌基合金无籽晶阻挡层微结构及热稳定性研究
邹建雄1,刘波1(),林黎蔚1,任丁1,焦国华2,鲁远甫2,徐可为3
Microstructure and Thermal Stability of MoC DopedRu-Based Alloy Films as Seedless Diffusion Barrier
Jianxiong ZOU1,Bo LIU1(),Liwei LIN1,Ding REN1,Guohua JIAO2,Yuanfu LU2,Kewei XU3

图4. 试样A和B沉积态和不同温度退火态的GIXRD谱

Fig.4. GIXRD patterns of sample A (a) and B (b) as-deposited and annealed at different temperatures