|
|
硅单晶中层错与氢的交互作用 |
蒋柏林;职任涛;褚武扬 |
北京科技大学;北京;100083;北京科技大学;北京;100083;北京科技大学;北京;100083 |
|
THE INTERACTION BETWEEN STACKING FAULT AND HYDROGEN IN SINGLE CRYSTAL SILICON |
JIANG Bailin; ZHI Rentao; CHU Wuyang (University of Science and TechnologyBeijing; Beijing 100083) |
引用本文:
蒋柏林;职任涛;褚武扬. 硅单晶中层错与氢的交互作用[J]. 金属学报, 1997, 33(6): 573-576.
,
,
.
THE INTERACTION BETWEEN STACKING FAULT AND HYDROGEN IN SINGLE CRYSTAL SILICON[J]. Acta Metall Sin, 1997, 33(6): 573-576.
1 Mahajan S, Rozgonyi G A, Brasen D. Appl phys lett. 1977: 30(2): 73 2 Patal J R.J Appl Phys,1977:48:5279 3 Maber D M.J Appl Phys,1976;47:3813 4 Dishman J M.Haszko S E,Marcus R B,Murarka S P,Sheng T T.J ApplPhys,1979:50:2689 5 Jenkins M W J Eleclrochem Soc,1977;124:757 6 Lang A R.J Appl Phys,1958:29:597p |
|
Viewed |
|
|
|
Full text
|
|
|
|
|
Abstract
|
|
|
|
|
Cited |
|
|
|
|
|
Shared |
|
|
|
|
|
Discussed |
|
|
|
|