溅射Al对Si<sub>3</sub>N<sub>4</sub>润湿性的改善与钎焊

doi:10.11900/0412.1961.2017.00026

金属学报

2017, Vol. 53

Issue (12): 1645-1650 DOI: 10.11900/0412.1961.2017.00026

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溅射Al对Si₃N₄润湿性的改善与钎焊

刘葛亮¹, 马冰洋¹, 尚海龙^1,², 陈凡¹, 李荣斌², 李戈扬¹(

)

1 上海交通大学金属基复合材料国家重点实验室上海 200240
2 上海电机学院上海 201306

Wettability Improvement and Brazing of Si₃N₄by Sputtered Al

Geliang LIU¹, Bingyang MA¹, Hailong SHANG^1,², Fan CHEN¹, Rongbin LI², Geyang LI¹(

)

1 State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai 200240, China
2 Shanghai Dianji University, Shanghai 201306, China

引用本文:

刘葛亮, 马冰洋, 尚海龙, 陈凡, 李荣斌, 李戈扬. 溅射Al对Si₃N₄润湿性的改善与钎焊[J]. 金属学报, 2017, 53(12): 1645-1650.
Geliang LIU, Bingyang MA, Hailong SHANG, Fan CHEN, Rongbin LI, Geyang LI. Wettability Improvement and Brazing of Si₃N₄by Sputtered Al[J]. Acta Metall Sin, 2017, 53(12): 1645-1650.

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摘要:

采用溅射Al和Al-Ni薄膜作为钎料的方法,研究了溅射Al对Si₃N₄的润湿作用,实现了铝基薄膜钎料对Si₃N₄陶瓷的直接钎焊。结果表明,Al直接溅射在Si₃N₄表面所获得的各钎焊接头钎缝致密饱满,与陶瓷形成无反应过渡层的良好冶金结合,纯Al钎焊接头的剪切强度为106 MPa,Al-1.0%Ni亚共晶钎焊接头的强度提高到148 MPa,Al-3.0%Ni接头的强度因钎缝形成共晶组织而略有降低,为132 MPa,这些接头的剪切断裂均产生于钎缝之中。采用首先溅射Ni薄膜作为底层的Al-1.0%Ni薄膜钎料进行了对比,这种钎料得到的钎焊接头断裂产生于钎缝与陶瓷的界面,强度也仅为81 MPa。这表明,高能量溅射Al粒子直接撞击对Si₃N₄具有“润湿”作用,使得Al和Al-Ni合金薄膜熔化后即可实现对Si₃N₄的钎焊。

关键词 ： Si₃N₄陶瓷, 润湿, 溅射薄膜, 钎焊

Abstract：

In the present technology, the brazing of Si₃N₄needs a reactive transition layers to resolve the non-wetting problem of usual metal fillers. Aluminum could wet Si₃N₄ without reaction but the brazing is very difficult due to wetting temperature above 1000 ℃. In this work, the wetting effect of sputtered Al films on Si₃N₄and its physics essence were revealed. Based on this, the brazing of Si₃N₄ ceramic with Al or Al-Ni film fillers was realized near their melting temperature. The results showed that the seams of brazing joints with direct sputtered Al on Si₃N₄ film were well-stacked and less defects, and well metallurgically bonded to ceramic without reactive transition layers. The shear strength of pure Al/Si₃N₄ joint reached 106 MPa. The strength increased to 148 MPa with adding 1.0%Ni into film filler due hypoeutectic structure in the seam. With further increasing Ni content to 3.0%, the eutectic structure of the seam slightly decreased the strength of joint to 132 MPa. These joints above all fractured in joint seams. Moreover, the Al-1.0%Ni film filler first sputtered Ni layer was compared. Its brazing joint fractured at the interface between seam and ceramic and the shear strength decreased to only 81 MPa. This comparsion revealed the "wetting" effect of the bombardment of energetic sputtered Al particles. This effect still existed after filler melting and the direct brazing of Si₃N₄ ceramic without reactive transition layers was realized.

Key words： Si₃N₄ ceramic wetting sputtered film brazing

收稿日期: 2017-01-20

ZTFLH:

TG454

基金资助:国家自然科学基金项目Nos.51401120和51671125,上海自然科学基金项目No.16ZR1412800

作者简介:

作者简介刘葛亮,男,1991年生,硕士生

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https://www.ams.org.cn/CN/10.11900/0412.1961.2017.00026 或 https://www.ams.org.cn/CN/Y2017/V53/I12/1645

表1 铝基薄膜钎料的结构、成分及Si3N4钎焊接头的剪切强度

图1 不同成分钎料接头焊缝的SEM像

图2 各钎料钎焊接头剪切断口的OM像

图3 结构为Si3N4/Ni(50 nm)/Al(7 μm)的Al-1.0%Ni薄膜钎料(样品No.2b)所获接头剪切断口的OM像

图4 2种薄膜熔化后的OM三维形貌像

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